Hitachi 4700 Scanning Electron Microscope
Figure 1: View of the Hitachi SEM
apparatus.
The Hitachi S-4700 FE-SEM is a high-resolution cold field emission scanning electron microscope, allowing high resolution captures of thin film specimens.
The SEM is located in the Carleton Laboratory but operated by MRSEC Center for Nanostructured Materials.
Specifications
- Manufacturer: Hitachi, Japan
- Model: S-4700
- Wafer Size: 100 mm
- Resolution: 12.00 Å
- Magnification:
- High Magnification Mode: 100X to 500,000X
- Low Magnification Mode: 20X to 2,000X
- Electron Gun: Cold Cathode Field Emission Type
- Extracting Voltage (Vext): 0 to 6.5kV
- Acceleration Voltage (Vacc): 0 to 30 kV in 100V steps
- Lens: 3-stage electromagnetic lens, reduction type
For further information on availability and rates, contact Austin Akey at +1.212.854.0260.